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| Reali-Slim® Thin-Section Bearings for Semiconductor Applications |
At the Heart of More Semiconductor Equipment Applications than Any Other Bearing As the world leader in thinsection bearings, Kaydon is uniquely suited to meet the ever-changing needs of the semiconductor equipment industry. By blending technical innovation with cost-effective JIT manufacturing,
we supply more than 350 sizes of Reali-Slim bearings from stock—and deliver over 9,000 versions of these base bearings with
very short lead times.
Kaydon makes it easy to select the right bearings for your specific semiconductor equipment applications. We offer a
number of helpful tools that take the guesswork out of bearing selection, including:
Free Customized Engineering Review
Kaydon will be happy to perform a detailed bearing analysis based on your specific equipment designs. Within as little as 48 hours after receiving the necessary data, we’ll send you a free Engineering Review. All dimensional information and
mounting recommendations for your bearing application will be included. This document will also contain a report covering static and dynamic capacities, stiffness and deflection expectations, frictional torque, and the effect of fi tup and
temperature on bearing performance. The review even includes proposal drawings of the bearing. Formal specification
drawings containing a unique part number for traceability, design verification, and simplification of orders can be provided upon request. To initiate a bearing analysis at no charge, just visit our web site at www.reali-slim.com and
fill out the bearing application sheet. Or, fill out the sheet on the next page and send it by fax to Kaydon at 1-231-759-4102.
Reali-Design™ Software
Bearing selection guidance and specifications can be determined from this engineering program. It can be downloaded from
Kaydon’s web site, or mailed to you as desired.
Toll-Free Engineering Services Hotline
Our application engineers are standing by to answer your inquiries. They’re familiar with a broad range of semiconductor equipment applications and can help you quickly determine which Reali-Slim bearing will provide optimal performance in your product. For free assistance, call 1-800-514-3066.
Reali-Slim Catalog 300
Catalog 300 is much more than an ordinary product catalog. It shows how load, speed, and accuracy requirements affect the selection of a thin-section bearing. Torque, clearance, and deflection are explained and calculated to help define suitable bearing selection. Installation, shaft and housing fits, and maintenance are also covered for over 350 stock bearing sizes.
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Compact design
The space-saving design of Reali- Slim bearings allows you to engineer rotating devices that are smaller, simpler and lighter.
Precision tolerances
Reali-Slim bearings are manufactured in a range of classes for optimal precision and design flexibility.
Temperature Limits
Kaydon can provide off-the-shelf bearings suitable for temperatures up to 250° F. With a wide selection of materials and lubricants available, alternative materials may permit even higher operating temperatures.
Vacuum compatibility
Standard bearings are intended for atmospheric conditions. Vacuum levels of 10-6 to 10-8 Torr can be achieved with special lubricants and materials.
Low particulates
Particulate generation is the primary failure mode of bearings in vacuum surface treatments. Materials and lubricants can be specified to extend bearing operational life.
Non-magnetic bearings
For lightly loaded applications, hybrid bearings can improve torque characteristics and extend life.
Chemical compatibility
Kaydon can recommend special materials or processing for corrosive chemical environments such as acidic or basic vapors and liquids.
Design verification
To help you optimize the performance of your Reali-Slim bearings, Kaydon will be happy to provide a bearing recommendation and a specification control drawing for your reference.
Whatever the special demands of your semiconductor manufacturing equipment application, we can recommend a bearing wit the specific combination of the characteristics you need. Our Reali-Slim bearings can be optimized to minimize friction, outgassing, contamination, corrosion and even wear. All of these can be achieved without sacrificing bearing accuracy.
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Open bearing types
Kaydon Reali-Slim Bearings are the industry standard in thin-section ball bearings, available from stock in 1"to 40" bores and 3/16" to 1" cross sections.
In each of the eight dimensional series, bearing cross section is held constant over a wide range of bore diameter sizes. Three basic configurations support various combinations of applied loads—Type "C" for pure radial loads, Type "A" for radial and thrust loading, and Type "X" 4-point contact design for any combination of radial, thrust and moment loading on a single bearing.
Shields and seals can help retain lubricant
Shields or seals can be added into these thin-section bearings without increasing their space requirements. Seals are often used in atmospheric environments, but due to particle generation, are generally unsuitable for vacuums. In these ultra-clean environments, shields become the designer's choice. There is no torque penalty due to the shields not quite touching the inner race. This also means that there is no particle generation from the shield, as there is no sliding between the shield and inner bearing race.
Duplex Bearing Evolution
Designers typically specify a duplexed pair of angular contact bearings when high speed or smooth torque is the overriding requirement. Unfortunately, the disadvantages of using two separable bearings are potential errors in alignment and orientation during assembly.
The Super Duplex has a common race, either a single outer or a single inner, which has two bearing paths in it. As these are ground at the same time, they "run-out" together. This further helps to smooth out potential torque variations that would be caused by the variations in axial runout adding torque into the bearing. A further advantage is that since the bearing assembly is not separable, the possibility for installation orientation errors is eliminated. Another advantage is stiffness gained through a more rigid outer race.
The "Cartridge" bearing takes this design a step further. A cartridge style bearing has both a single outer and a single inner race. This design results in the absolute best torque performance. Like the Super Duplex, this design also eliminates potential installation errors.
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